Materials for microlithography - radiation-sensitive polymers
- Författare
- American chemical society American chemical society L. F. Thompson
- (Based on a symposium cosponsored by the Division of Polymeric Materials, Science and Engineering and the Division of Polymer Chemistry, at the 187th Meeting of the American Chemical Society, St. Louis, Missouri, April 8-13, 1984.)
- Genre
- Konferenser, Ej skönlitteratur, Konferenspublikation, Bibliografi
- Språk
- Engelska
| Förlag | År | Ort | Om boken | ISBN |
|---|---|---|---|---|
| 1984 | USA, Washington, D.C | 494 sidor. |